Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators

Disha Chugh,Hyun-Keun Kwon, Gabrielle D. Haddon-Vukasin,Thomas W. Kenny,Saurabh A. Chandorkar

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS（2025）

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Sensors,Voltage measurement,Resonators,Electrodes,Performance evaluation,Topology,Capacitance,Electric variables measurement,Electric potential,Noise measurement,resonators,electrostatic analysis,signal-to-noise ratio,robustness,capacitive transducers

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