Optimization of Specific On-Resistance of a Two-Zone Variational Vertical Doping Superjunction with Insulating Layers
SEMICONDUCTOR SCIENCE AND TECHNOLOGY（2025）
Key words
Analytic model,breakdown voltage (BV),optimization,specific <sc>on</sc>-resistance (<italic>R</italic><sub>on,sp</sub>),variational vertical doping superjunction (VVDSJ)
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