Model of Quality Factor for (111) 3C-Sic Double-Clamped Beams Angela Garofalo,Annamaria Muoio,Sergio Sapienza,Matteo Ferri,Luca Belsito,Alberto Roncaglia,Francesco La ViaMicromachines(2025)引用 0|浏览0关键词silicon carbide,MEMS,quality factor,3C-SiC,resonance frequencyAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要