High Performance 3D ITZO DGTFTs and Their Application in Wearable Pulse Sensors
2024 IEEE International Electron Devices Meeting (IEDM)（2024）
Key words
Sensor Applications,Wearable Sensors,Dual-gate Thin-film Transistor,Blood Pressure,3D Structure,Coupling Effect,Magnetron Sputtering,Channel Layer,Gate Dielectric,Pulse Waveform,Dielectric Structure,Top Gate,Top Channel,Mechanical Reliability,3D Channel,Chemical Vapor Deposition,Pulse Wave,Active Layer,Dielectric Layer,Atomic Layer Deposition,Bottom Gate,Gate Dielectric Layer,Capacitive Coupling,DC Sputtering,Gate Electrode,Blood Pressure Waveform,Barrier Layer,Wave Reflection,Amorphous Thin Films,Current Ratio
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