Record Endurance (> 1012 Cycles), High Polarization (2pr > 50 Μc/cm2), and 10-Year Data Retention (85°C) in HZO Capacitors with Well-Ordered Ferroelectric Domain Structures Via 2D-WS2 Interface
2024 IEEE International Electron Devices Meeting (IEDM)（2024）
Key words
Multi-domain,High Polarity,Data Retention,Well-ordered Structure,Well-ordered Domains,10-year Data Retention,Chemical Reactions,Bottom Layer,Interfacial Layer,Atomic Layer Deposition,Stable Interface,Unwanted Reactions,Nanoscale Devices,Pristine State,Atomic Layer Deposition Process,Crystallinity,Random Distribution,Protective Layer,Oxygen Vacancies,Top Electrode,Current Switching,Rapid Thermal Annealing,Switching Transients,Dead Layer
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