An Iterative Extremely Accurate Generalized Design Methodology for TSV-Based Hybrid AlScN FBAR and IPD Filtering Chips
IEEE Transactions on Microwave Theory and Techniques（2025）
关键词
AlScN-based film bulk acoustic resonator (FBAR),generalized iterative design methodology,high-performance stopband,hybrid bandpass filter (BPF) chip,integrated passive device (IPD)
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