Low-Temperature Atomic Layer Deposition of GeTe/Sb2Te3 Superlattice with High-Quality Van Der Waals Structure
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS（2025）
Key words
2D materials growth,GeTe/Sb2Te(3) superlattices,high-textured crystal growth,low-temperature atomic layer deposition,phase-change memory
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined