Nanomole Process: Enabling Localized Metallic Back-Gates for Enhanced Cryogenic Front-to-Back Coupling in FDSOI Quantum Dots
IEEE Journal of the Electron Devices Society（2025）
关键词
Cryo-CMOS,FDSOI,quantum dots,vapor phase etching,back-gate,dual-gate control,volume inversion,valley splitting,nanomole process
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