Ultra-Sensitive, High-Bandwidth Photonic-Mems Seismic Sensor

Farnaz Ebrahimi Argi, Ayman Manzoor,Hamed Sattari,Yves Petremand, Dara Bayat, Luigi Ferraioli, Antoniou Anastasios,Domenico Giardini,Katrin Plenkers, Arno Hoogerwerf,Homa Zarebidaki, Guido Spinola Durante, Amir H. Ghadimi,Linus Villiger,Stefan Wiemer,Michel Despont

2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)（2025）

Cited 0|Views1

Key words

Seismic sensor,Photonic-MEMS,Accelerometer,Nanomechanical Resonator,Mach-Zehnder Interferometer,High Quality Factor

AI Read Science

Must-Reading Tree

Example

Generate MRT to find the research sequence of this paper

Chat Paper

Summary is being generated by the instructions you defined