MEMS Gas Sensor Array Fault Diagnostic Unit for Microsystem Applications

Jie Fu, Jian Yang, Hongshuo Fu,Bing Liu,Wenbin Zheng,Ping Fu

2024 International Conference on Sensing, Measurement & Data Analytics in the era of Artificial Intelligence (ICSMD)（2024）

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MEMS gas sensor array,microsystems,fault diagnosis,multitask learning,embedded deployment

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