Modeling and Optimization of Structural Tuning in Bandgap-Engineered Tunneling Oxide for 3D NAND Flash Application

Zhihong Xu, Shibo Xie, Zhijun Ying, Wenlong Zhang,Liming Gao

Electronics（2025）

Cited 0|Views6

Key words

3D NAND flash memory,bandgap-engineered tunneling oxide (BE-TOX),retention,TCAD simulation

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