Effect of Substrate Negative Bias on the Composition and Structure of Nc-Cu/a-c:H Nanocomposite Films Deposited by FCVA

Qingyan Hou, Xiao Ouyang,Shuai Wu, Pan Pang, Yifan Zhang,Qian Li, Lin Chen,Xiaoyue Jin,Xu Zhang,Bin Liao

Coatings（2025）

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Key words

FCVA,nc-Cu/a-C:H,bias voltage,Cu content,deposition rate,stress,sp

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