A MEMS Electro-Mechanical Co-Optimization Platform Featuring Freeform Geometry Optimization Based on a Genetic Algorithm

Chen Wang, Xinyu Wu,Sina Sadeghpour, Milad Shojaeian, Linlin Wang, Bernardo Pereira Madeira, Yangyang Guan,Huafeng Liu,Yuan Wang,Pan Zhang,Pui-In Mak

Microsystems & nanoengineering（2025）

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