Multi-Scale Modeling-Driven Material to Device Co-Optimization of Ferroelectric Capacitors with Oxygen Reservoir Layer (ORL) for Improved Endurance

Andrea Padovani, Nashrah Afroze, Yu-Hsin Kuo, Priyankka Gundlapudi Ravikumar, Prasanna Venkatesan Ravindran,Mengkun Tian,Asif Khan, Jihoon Choi,Jun Hee Lee,Luca Larcher,Gaurav Thareja

2025 IEEE International Reliability Physics Symposium (IRPS)（2025）

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Key words

Hf-based ferroelectrics,HZO,Ginestra™,multi-scale modeling,degradation,Oxygen reservoir layer (ORL),self-healing

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