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Temperature-dependent Wakeup Behavior in Back-End-of-line Compatible Ultra-Thin HfxZr1−xO2 Ferroelectric Film

Xiaopeng Li,Lu Tai, Xiaoyu Dou, Yang Feng,Dong Zhang,Xuepeng Zhan, Jixuan Wu,Xiao Gong,Jiezhi Chen

Science China Information Sciences（2025）

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