Research on Drive and Detection Technology of CMUT Multi-Array Transducers Based on MEMS Technology

Chenyuan Li, Jiagen Chen,Chengwei Liu, Yao Xie, Yangyang Cui, Shiwang Zhang,Zhikang Li,Libo Zhao, Guoxing Chen,Shaochong Wei, Yu Gao,Linxi Dong

Micromachines（2025）

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