Design and Synthesis of Radiation-Sensitive Monomer and Polymers for Potential Application in Extreme Ultraviolet Lithography

Jingyi Gan, Yuanzhuang Li, Lei Yang, Rui Wang, Chenyu Zheng,Guomin Xiao

Journal of Polymer Research（2025）

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关键词

Radiation-sensitive materials,Nonchemically amplified resists,Free-radical polymerization,Copolymers

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