Etching Surface and Etching Dimension Control for IGZO TFT Fabrication in 3D Memory Device

Zehuan Hei, Yang Xu, Yang Liu, Zhonghua Jin, Tuo Xin, Xiaodong Li, Ganlin Song, Jiao Jin, Wenjun Chen, Chaoyang Guan, Jian Li, Ming Zeng, Baodong Han, Hongbo Sun,Guilei Wang,Chao Zhao

2025 Conference of Science and Technology of Integrated Circuits (CSTIC)（2025）

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Key words

Surface Etching,3D Device,Thin Films,Etching Process,Wet Etching,Etching Method,Smooth Profile,Uniform Thin Film,Smooth Surface,Low Selectivity,Silicon Nitride,Wet Process,Dry Etching,polySia,Selective Etching,Bottom Hole,Titanium Nitride,Metal Lines,Thermal Budget,Dry Etching Process,Wet Etching Process

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