Single-photon Emitters in PECVD-grown Silicon Nitride Films: from Material Growth to Photophysical Properties

Zachariah O Martin, Alexander Senichev, Pranshu Maan, Mustafa G Ozlu, Miroslava Marinova, Zhongxia Shang,Alexei Lagutchev,Alexandra Boltasseva,Vladimir M Shalaev

Nanophotonics (Berlin, Germany)（2025）

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Key words

quantum emitters,single-photon emitters,silicon nitride,chemical vapor deposition,quantum photonics

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