基本信息
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Bio
During his PhD thesis, entitled AlN Thin Film Electroacoustic Devices, Uppsala University (Sweden), the researcher acquired a solid experience in the synthesis of AlN thin films by "reactive sputtering". During his postdoctoral fellowship in the nanotechnology division at IMEC (Interuniversitary Microelectronics Center) in Leuven, Belgium, the researcher learned essential growth techniques and structural and electrical aspects of characterization techniques related to carbon nanotubes and nanocolumns of semiconductor materials.
Experience in clean room: the researcher worked for 6 years in the clean room of the Ångström laboratory at the University of Uppsala (Sweden), for 2.5 years in the clean room of IMEC in Leuven (Belgium) and over 12 years in the clean room at ISOM (Institute for Optoelectronic Systems and Microtechnology) at the Technical University of Madrid (UPM) (Spain). Therefore, more than two decades of experience in clean room work where the researcher has learned all the processes available in a clean room dedicated to work in the area of semiconductors. Some examples of these processes are: Lithography (both optical and electron beam), DRIE (dry attack by reactive ions), CVD (chemical vapor deposition), Sputtering or CMP (mechanical-chemical polishing).
Extensive experience in the structural characterization of materials techniques, widely used in the field of microelectronics and nanotechnology such as XRD (X-ray diffraction), AFM (atomic force microscopy) and SEM (scanning electron microscopy). The researcher has used these and other techniques during his PhD as well as during his post-doctoral stay in addition to his time at ISOM.
Likewise, the researcher wishes to record the following related to his contribution as Contracted Ramón y Cajal (competitive Spanish National Research Council fellowship): Head of the Laboratory of CVD-RIE Institute of Optoelectronic Systems and Microtechnology. UPM (January 2007 - January 2013). Responsible for the manufacturing equipment of reactive sputtering of AlN and related compounds at ISOM (January 2007- until today). Reviewer for articles in Journal of Nanoparticle Research, Journal of Nanomaterials, Journal of Applied Physics, Journal of Vacuum Science and Technology A and Solid State Sciences. All publications belong to internationally renowned journals. He has been collaborator in more than ten research projects at a national level, two at European level and has supervised two research projects.
Since March 2011, the researcher is Asisstant profesor (Professor Contracted Doctor I3) at the Technical University of Madrid (UPM). Since that date, among other achievements, it is worth mentioning the direction of two Master projects at UPM and two PhD theses at that university. The researcher has designed, assembled and optimized a AlN reactive sputtering system at ISOM´s clean room. The system enables the synthesis of high quality AlN thin films used in a wide range of applications. The researcher has collaborated in more than 10 research projects and has been IP (main researcher) at ISOM of the project '' Microsystems of thermal control for industrial applications (T-MEMS) '', funded with 1.2 M EUR by the Community of Madrid.He has also been IP (principal investigator) of the project “SAW devices on diamond substrates” funded by Huawei Technologies Ltd, based in Ontario, (Canada)
Research Interests
Papers共 44 篇Author StatisticsCo-AuthorSimilar Experts
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physica status solidi (a)no. 20 (2019): 1900360
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Smart Materials and Structuresno. 7 (2018)
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#Papers: 44
#Citation: 1169
H-Index: 18
G-Index: 34
Sociability: 4
Diversity: 3
Activity: 1
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