Structural and luminescence imaging and characterisation of semiconductors in the scanning electron microscope
Carol Trager-Cowan,Aeshah Alasmari, William Avis,Jochen Bruckbauer,Paul R Edwards,Gergely Ferenczi,Benjamin Hourahine, Almpes Kotzai,Simon Kraeusel,Gunnar Kusch,Robert W Martin, Ryan McDermott,Naresh Gunasekar,M. Nouf-Allehiani,Elena Pascal,David Thomson,Stefano Vespucci,Matthew David Smith,Peter J Parbrook,Johannes Enslin,Frank Mehnke,Christian Kuhn,Tim Wernicke,Michael Kneissl,Sylvia Hagedorn,Arne Knauer,Sebastian Walde,Markus Weyers,Pierre-Marie Coulon,Philip Shields,J. Bai,Y. Gong,Ling Jiu,Y. Zhang,Richard Smith,Tao Wang,Aimo Winkelmann SEMICONDUCTOR SCIENCE AND TECHNOLOGY（2020）
Key words
SEM,EBSD,CL,ECCI,nitride,extended defects
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