High-Q Factor Multiferroic Resonant MEMS Low Frequency Magnetic Field Sensors
2022 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFCS)（2022）
关键词
MEMS,Multiferroics,Magnetometers,Magnetic Sensing,Aluminum Nitride,Iron Cobalt,Modulation
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