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Chemical Profiles of the Oxides on Tantalum in State of the Art Superconducting Circuits

Russell A. A. McLellan,Aveek Dutta,Chenyu Zhou,Yichen Jia,Conan Weiland,Xin Gui,Alexander P. M. Place,Kevin D. D. Crowley,Xuan Hoang Le,Trisha Madhavan,Youqi Gang,Lukas Baker,Ashley R. R. Head,Iradwikanari Waluyo,Ruoshui Li,Kim Kisslinger,Adrian Hunt,Ignace Jarrige,Stephen A. Lyon,Andi M. M. Barbour,Robert J. J. Cava,Andrew A. A. Houck,Steven L. L. Hulbert,Mingzhao Liu,Andrew L. L. Walter,Nathalie P. P. de Leon

ADVANCED SCIENCE（2023）

Cited 20|Views64
Key words
dielectric loss,oxide,qubits,superconducting thin films,tantalum,X-ray photoelectron spectroscopy
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