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Development of the Reactive Force Field and Silicon Dry/wet Oxidation Process Modeling

Junichi Noaki, Satoshi Numazawa,Joohyun Jeon, Shuntaro Kochi

NPJ COMPUTATIONAL MATERIALS(2023)

引用 4|浏览2
关键词
Atomistic models,Electronic properties and materials,Materials Science,general,Characterization and Evaluation of Materials,Mathematical and Computational Engineering,Theoretical,Mathematical and Computational Physics,Computational Intelligence,Mathematical Modeling and Industrial Mathematics
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