Self-Monitoring Temperature Distribution of Single-Photon Avalanche Diode Array

Yu-Wei Lu,Yao-Lun Liu, Chih-Yun Liao,Chun-Hsien Liu, Chia-Yi Chu, Meng-Hsuan Lu, Tien-Ning Chang,Jenq-Shinn Wu,Jau Yang Wu,Chia-Ming Tsai,Sheng-Di Lin

IEEE sensors journal（2024）SCI 2区SCI 3区

Natl Yang Ming Chiao Tung Univ | Natl Changhwa Univ Educ | Yuan Ze Univ

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Abstract

We propose and verify on-chip temperature-sensing using single-photon avalanche diodes (SPADs) in complementary metal-oxide-semiconductor (CMOS) process. The dark count rate of SPAD is sensitive to device temperature and of use for temperature monitoring. The best measured noise-equivalent temperature difference is less than 0.17 degrees C over the range of 10 degrees C-60 degrees C. A 32x32 SPAD array with an on-chip heat source has been deployed to demonstrate its capability of 2-D temperature mapping. The good consistence between the measured temperature distributions and the simulated ones has been observed.

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Key words

Single-photon avalanche diodes,Temperature measurement,Temperature sensors,Temperature distribution,Temperature dependence,Standards,System-on-chip,Semiconductor device measurement,Sensor arrays,Voltage measurement,Complementary metal-oxide-semiconductor (CMOS) technology,on-chip,single-photon avalanche diodes (SPADs),temperature sensing,temperature sensor array

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