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3DIC with Stacked FinFET, Inter-Level Metal, and Field-Size ($\mathbf{25}\times \mathbf{33}\mathbf{mm}^{\mathbf{2}}$) Single-Crystalline Si on SiO2 by Elevated-Epi

Bo-Jheng Shih,Yu-Ming Pan, Hsiao-Jen Chung, C. Lee,I-Chun Hsieh,Nein-Chih Lin,Chih-Chao Yang,Po-Tsang Huang,Hung-Ming Chen,Chiao-Yen Wang, Han-Lun Chiu,Huang–Chung Cheng,Chang-Hong Shen,Wen-Fa Wu,Tuo‐Hung Hou,Kuan‐Neng Chen,Chenming Hu

openalex（2024）

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