Analysis of Negative Capacitance Effect in Sub-3-nm Forksheet FETs
IEEE TRANSACTIONS ON ELECTRON DEVICES(2025)
关键词
3-D technology computer-aided design (TCAD),forksheet (FSH),nanosheet (NSH),negative capacitance (NC),subthreshold swing (SS),3-D technology computer-aided design (TCAD),forksheet (FSH),nanosheet (NSH),negative capacitance (NC),subthreshold swing (SS)
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