Elimination of 3D NAND Through-Array Contact Shortage on Yield Enhancement

Kuan-Ting Lu,Yuan-Chieh Chiu, Cheng-En Tsai, Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen, Chih-Yuan Lu

2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)（2025）

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TAC,plasms tilting,yield enhancement,3D NAND

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