Atomistic Multiscale Simulation-Based Extraction of Design Margins in Advanced Transistor Architectures

Jun Jung, Geunsang Yoo,Alexander Schmidt, Wonyup Song,Hiroyuki Kubotera, Muralikrishna Raju, Byounghak Lee,Woosung Choi,Anthony Payet, Hiroo Koshimoto,Yasuyuki Kayama, Beom Seo Kim, Chungyeon Lee,Jamin Koo,Joohyun Jeon, Seungmin Lee,Dae Sin Kim

2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)（2024）

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关键词

Multiscale Simulation,KMC,MD,Epitaxy,DRAM

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